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These valves will be used to prevent vacuum chambers to be pressurized during venting. Overpressure relief valves are typically used in load lock chambers. Overpressure Relief Valves are mounted in vertical orientation. Wide bore versions will relief more liters/minute of gas.
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Specialist in High-Vacuum technology.
Tel: +31 (0)226 33 21 00
E-mail: vacuum@demaco.nl
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Visiting address
Oester 2
NL-1723 HW Noord-Scharwoude
Post address
PO Box 4
NL-1723 ZG Noord-Scharwoude
vacuum@demaco.nl
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