Category: Titanium Sublimation Vacuum Pump

TSPs, often integrated with ion pumping systems, provide extra-high pumping speeds for getterable gases. The TSP can function within an Ion pump or as a separate TSP unit.

Getter pumping involves depositing periodically sublimed titanium from heated Ti filaments onto cooled surfaces. This intermittent pumping achieves very low pressures, enhancing the base vacuum. Pumping efficiency is controlled by adjusting filament heat intensity and operating cycle frequency. This periodic titanium sublimation is used in conjunction with continuous, standard or rare gas ion pumping for basic pumping operations.

When the TSP is used in conjunction with a liquid Nitrogen cooled cryopanel, extra-high water vapor pumping speed will be achieved. Liquid Nitrogen panels can of course also be cooled with water.

The only difference between the Perkin Elmer and the Varian cryoshroud is the flange for the TSP cartridge