Category: Hot Cathode Vacuum Module

Ultra-High Vacuum Gauge Head – Precision Meets Durability

Monitor your process with confidence using our Capacitance Diaphragm Vacuum Gauge Head, engineered for ultra-high vacuum applications and seamless integration with B-RAX™ controllers.

Measurement Range:
✔ 1.0 × 10⁻⁹ to 5 × 10⁻² Torr
✔ 1.3 × 10⁻⁹ to 6.7 × 10⁻² mbar
✔ 1.3 × 10⁻⁷ to 6.7 Pa

Full Range Capability:
From ultra-high vacuum to atmosphere when paired with B-RAX™ controllers and a convection gauge.

Design Highlights:
✔ Dual Hot Filament Design – Rugged all-metal construction for long life
✔ Built-In Electrometer – Reduces controller and cabling costs
✔ Compact, Field-Replaceable Sensor Assembly – Easy maintenance

Controller Integration:
Works exclusively with B-RAX™ controllers for remote operation, including:
• Filament on/off
• Degas function
• Emission current control

Ideal for semiconductor tools, thin-film deposition, and critical vacuum processes, this gauge delivers fast response, superb stability, and true process monitoring.