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Category: HV Square Sputter Kathode

Square sputtering sources feature a `modular magnet array` which is completely isolated from the cooling water to eliminate magnet deterioration and subsequent degradation of source performance. This design permits easy access to the internal magnetic component arrangement thus allowing the same source to be operated

They enable operation as both balanced and unbalanced magnetrons, with compatibility for magnetic material targets and diode sputtering. They cater to diverse needs: reverse sputtering, varied sputtering rates, electron energy adjustments, and optimal discharge voltage for efficient performance.

Target diameter ST1550 -ST2080:              5.0” x 1.5” to 8.0” x 2.0”
Maximum Power – DC/RF (Watt)              150/150 to 1500 / 1000
Cooling water (liters / minute)                   0.4 – 3.0
Source head diameter                                 6.35” x 2.85” to 9.51” x 3.50”
Source head height                                      2.85” to 3.68”

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