Category: Process Gas Analysis

ReacTorr-S™ stands out with true monitoring throughout the entire process stage, featuring an automated inlet valve that maintains constant pressure in the Mass Spectrometer system, regardless of process pressure. The instrument’s core, a sensitive Quadrupole Mass Spectrometer with an enhanced enclosed ion source, coupled with ESS reliability, ensures superb stability and fast response time, enabling direct mounting onto the process tool for genuine monitoring conditions, along with a user-friendly software suite tailored for process tool applications, enhancing overall process integrity and efficiency..

The Rectorr-V™ features automated inlet sensors that can pick up changes in the process pressure, adjusting itself to maintain the correct pressure in the analyzer housing. This dynamic instrument features an automatic wide range inlet meaning that the system is suitable to monitor from atmospheric (1000mbar) to high vacuum (10E-9mbar).

With detection levels in the low parts of the per billion range, and a compact, low footprint design (30x30cm) meaning that the Reactorr-V™ can be connected either directly to or adjacent to the vacuum process tool, and enhance the integrity of the process.